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Smart inspection system for high speed and multifunctional testing of MEMS and MOEMS (SMARTIEHS)
Date du début: 1 avr. 2008, Date de fin: 30 sept. 2011,
...lements), CNRS (production of refractive optics, micro lenses), CSEM (design and production of smart pixel detector arrays), Heliotis (exploitation), IMMS (macro design of the inspection system), and Techfab (end user and validation).SMARTIEHS lasts 38 months and has a budget of 3,77M�. Requested EC contribution is 2,85 M�
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