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MEMS Gyro - Maturity assessment of performance and integration (MEMS MATURITY)

Date du début: 3 déc. 2012, Date de fin: 2 janv. 2015,

"The program MEMS MATURITY has four goals:1/ To miniaturize the high performance gyro cell, Gyrix, of the SFWA (Smart Fixed Wings Aircraft) partner2/ To identify the critical paramaters of the process that influence the cell performance3/ To assess the impact of the variability of the critical parameters on the cell performance4/ To optimize the process for a repeatable manufacturing and to delive ...
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