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Processes for MEMS by inkjet enhanced technologies (PROMINENT)

Date du début: 1 mars 2013, Date de fin: 29 févr. 2016,

Prominent aims to incorporate inkjet printing as a part of the MEMS fabrication process. By using maskless, digitally controlled, localized additive processes instead of the subtractive processes used currently, selected steps in the MEMS manufacturing can be done with simplified process sequence. This will result in • lower initial investment cost for a MEMS line• greatly increased flexibility i ...
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