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Smart inspection system for high speed and multifunctional testing of MEMS and MOEMS (SMARTIEHS)
Date du début: 1 avr. 2008, Date de fin: 30 sept. 2011,
SMARTIEHS develops a smart, high-speed, cost effective and flexible inspection system for production of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). SMARTIEHS decreases the inspection time of a wafer by a factor of 100. It cuts production costs and shorten the time to market.To achieve this, SMARTIEHS develops an innovative measurement concept: a probing wafer consisting of an array of micro opt ...
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