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European 450mm Equipment Demo Line (E450EDL)

Date du début: 1 oct. 2013, Date de fin: 30 sept. 2016,

...studies and will be enabled by the controlled exchange of 450mm wafers between different sites. The consortium comprises 43 members (from 11 different European countries) with many SMEs and research institutes. The project is organized in five technical work packages and a work package on management and coordination. In the work package on integration and wafer processing first critical modules ...
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