2 projets européens trouvés
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TERMINÉ
Metrology for future 3D-technologies (METRO4-3D)
Date du début: 1 févr. 2016, Date de fin: 31 janv. 2019,
Within the food chain of equipment delivery for the semiconductor industry, Europe has kept a very strong position in the metrology area with many companies establishing themselves as main leaders in the field. Hence in line with the objectives of the ICT25 call for innovation action to overcome the (initial) barriers for the successful commercialization of novel European products, this project a ...
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Participants partenaires
TERMINÉ
Combined SIMS-SFM Instrument for the 3-Dimensional Chemical Analysis of Nanostructures (3D NanoChemiscope)
Date du début: 15 sept. 2008, Date de fin: 14 janv. 2013,
The objective of this project is to develop an innovative and novel combination of a new TOF-SIMS with substantially improved lateral resolution and sensitivity, combined with a new metrological high resolution SFM. The two techniques provide complementary information on nanoscale surface chemistry and surface morphology. In combination with a layer by layer removal of material using low energy sp ...
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