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3D Advanced Metrology and materials for advanced devices (3DAM)

Date du début: 1 avr. 2016, Date de fin: 31 mars 2019,

The objective of the 3DAM project is to develop a new generation of metrology and characterization tools and methodologies enabling the development of the next semiconductor technology nodes. As nano-electronics technology is moving beyond the boundaries of (strained) silicon in planar or finFETs, new 3D device architectures and new materials bring major metrology and characterization challenges w ...
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Fabrication and Functionalization of BioMedical Microdevices (FaBiMed)

Date du début: 2 sept. 2013, Date de fin: 1 sept. 2016,

The aim of FaBiMed proposal is to improve and develop new manufacturing techniques, based on micromoulding, specific for biomedical microdevices. The project will be to reducing the cost of mass production of diagnosis and therapeutic micro devices which have a common problematic: medium sized batches, customization needs, micron-scale geometrical features. These include optofluidic sensors (MIR t ...
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