2 projets européens trouvés
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TERMINÉ
LAB FAB for smart sensors and actuators MEMS (LAB4MEMS)
Date du début: 1 janv. 2013, Date de fin: 1 juin 2015,
General GoalsLab4MEMS will feature the Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, expected to fuel the next generation’s smart sensors and actuators based on MEMS:1. Micro-actuators, micro-pumps, sensors and electrical power generators, integrated on silicon-based piezoelectric materials (PZT) • for use in Data Storage, Ink Jet, Health Care, Automot ...
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Participants partenaires
TERMINÉ
High volume piezoelectric thin film production process for microsystems (piezoVolume)
Date du début: 1 janv. 2010, Date de fin: 31 déc. 2012,
This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS ...
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