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This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS ...

Management of the environment for predictable and sustainable use of natural resources is one of the great challenges of the 21st century. Although water covers most of the planet, it is becoming increasingly difficult to ensure adequate supplies of fresh, clean water for drinking, as well as, for sports and wellness activities. The demand for water resources is increasing as the population grows. ...