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Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale (ISTRESS)
Date du début: 1 janv. 2014, Date de fin: 31 déc. 2016,
"Intrinsic (or residual) stresses, resulting from manufacturing or processing steps, mostly define the performance and limit the lifetime of nanostructured materials, thin films, coatings and MEMS devices.The established techniques for micron-scale measurement of residual stress still have strong limitations, e.g. in terms of spatial resolution, lack of depth sensing, their applicability on non-cr ...
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