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Combined SIMS-SFM Instrument for the 3-Dimensional Chemical Analysis of Nanostructures (3D NanoChemiscope)
Date du début: 15 sept. 2008, Date de fin: 14 janv. 2013,
The objective of this project is to develop an innovative and novel combination of a new TOF-SIMS with substantially improved lateral resolution and sensitivity, combined with a new metrological high resolution SFM. The two techniques provide complementary information on nanoscale surface chemistry and surface morphology. In combination with a layer by layer removal of material using low energy sp ...
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