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LAB FAB for smart sensors and actuators MEMS (LAB4MEMS)
Date du début: 1 janv. 2013, Date de fin: 1 juin 2015,
General GoalsLab4MEMS will feature the Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, expected to fuel the next generation’s smart sensors and actuators based on MEMS:1. Micro-actuators, micro-pumps, sensors and electrical power generators, integrated on silicon-based piezoelectric materials (PZT) • for use in Data Storage, Ink Jet, Health Care, Automot ...
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