Rechercher des projets européens

This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS ...