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Mems Accelerometer- Maturity Assessment And Improvement
Date de clôture : 2 juin 2016  

 Électronique et microélectronique
 Fabrication industrielle
 Horizon Europe
 Ingénieur industriel

Topic Description

Specific Challenge:


In order to gain in cost, weight, power consumption and size, the introduction of Silicon MEMS Accelerometers Technology on the IMU is targeted. In the context of the IMU product development (Cleansky project Modular Advanced Inertial System), the introduction of Silicon Very High Performances MEMS Accelerometers Technology is targeted.
The purpose of this call is to define and improve MEMS Accelerometer manufacturing process maturity to reach a minimum MRL and TRL of 5.
Once these maturity levels achieved, integration of the MEMS Accelerometer on the IMU will be possible. For the full topic description see the Call Text Document (Annex of Workplan) published with this call.

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