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Phenomenology and applications of three-dimensional plasma-sheath-lenses (PLASMA-SHEATH-LENS)
Date du début: 1 août 2007, Date de fin: 31 juil. 2009,
Plasma processing technologies are based on radial-assisted ion-induced surface modifications where positive or negative ions accumulate energy within the sheath then strike the surface with certain energies and incidence angles. Due to the limited size of the treated electrodes the sheath is a two or three- dimensional structure. We have demonstrated very recently that the sheath forming to condu ...
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