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MEMS made Electron Emission Membranes (MEMBrane)

Date du début: 1 févr. 2013, Date de fin: 31 janv. 2018,

We propose a radically new and generic type of detector for photons, electrons and energetic charged particles: a stacked set of curved miniature dynodes in vacuum, created through MicroMechanical Electronic Systems (MEMS) fabrication techniques on top of a state-of-the-art CMOS pixel chip. This combination in itself is an extremely efficient electron detector. By capping the system with a traditi ...
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