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Automated in-line Metrology for Nanoscale Production (aim4np)

Date du début: 1 mars 2013, Date de fin: 31 août 2016,

Knowing the mechanical properties of workpieces and machine-tools also at the nanometer scale is an absolute necessity for an efficient nanoscale production. Current technologies are lacking the flexibility and robustness needed for measuring such key parameters as topography, morphology, roughness, adhesion, or micro- and nano-hardness directly in a production environment. This hinders rapid deve ...
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