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"Scanning Neutral Helium Microscopy: A novel tool for fast, nondestuctive characterisation of mechanical parameters for nanostructured coatings" (NEMI)
Date du début: 1 mars 2013, Date de fin: 31 août 2016,
...er large areas. We will apply the new technique to access the tool lifetime improvement by the application of nanostructured coatings to micron and nanometer precision master tools from SME partners Kenneth Winther A/S and NILTechnology. Metrology partners DFM and KTH will evaluate the new instrument in relation to ISO-standard parameters with the aim of introducing the technique to the ISO TC213 ...
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